What is the grade standard of clean room?
According to the standard issued by the federal government [Federal atandard (FS) 209E, 1992], the clean room can be divided into six levels. They are level 1, level 10, level 100, level 1000, level 10000 and level 00000 respectively. If the grade of the dust-free room is described only by the number of dust particles, it can be assumed that the size of dust particles is not 0.5um, and the grade of the dust-free room should be expressed in the series of - specific dust particle size. For example, grade 10 is 0.2um (the density is no more than 75 particles / cubic foot when the dust particle size is 0.2um or greater), and grade 1 is 0.1um (the density is no more than 35 particles / cubic foot when the dust particle size is 0.1um or greater). The cleanliness of the clean room required for IC manufacturing must be better than 1000.
Clean room grade, clean room standard, clean room standard definition
1、 Definition of clean room
Control the dust, pressure, temperature, humidity, air distribution and speed in the air within a certain range.
The dust mentioned here refers to the dust and particles that cannot be seen by the naked eye, and refers to the dust that cannot be completely removed by the general air purifier.
The dust-free room is generally divided into industrial clean room (ICR) for electronics and precision industry; And biological clean roo (BCR) for pharmaceutical and food industries that need to control microbial concentration.
2、 Federal specification clean room class
At present, it generally follows the U.S. federal standard 209b, while BCR mostly refers to the NASA specification (NASA 5340.2 specification) specifying the limit value of biological particles. Its fed STD cleanliness is expressed as: how many particles above 0.5um (micro) are contained in 1f13 air, and it is called [grade 00]. For example, when the air contains 10 particles less than 0.5, it is expressed as "grade 10". (II) the natural atmosphere usually contains 300000 particles.
3、 Under JIS standard, the cleanliness of clean room is divided into 8 grades
General cleanliness refers to the cleanliness level of air, which is divided into level 1 2 * *, 8 stages. In 1 cubic meter of air, if the dust with particle size of 0.1 micron is less than 10
1; Below 100 is 100 = 102 is grade 2; If there are less than 1000, it is 1000 = 103, level 3, - times, and so on.
In the 21st century, the development of the most cutting-edge industries has accelerated the reform of industrial structure, and the necessity of setting up dust-free rooms has also increased relatively.
With the increasing miniaturization and precision of commodities, the changes of dust and temperature and humidity also cause great harm to the completion of commodities, resulting in low quality. With the high-quality requirements of commodities, the demand for dust-free environment is also increasing. Therefore, it is particularly important to use dust-proof materials and commodities in dust-free rooms.
The so-called clean room is a man-made environment, which contains particles far lower than the general environment. With the rapid growth of integrated circuits, it also increases the requirements for the cleanliness of the manufacturing environment (clean room). In industry, even if the size of particles is less than 0.1 micron It may also hinder the operation of the product or reduce its service life. With the rise of nanotechnology, the critical size of semiconductors continues to shrink, the integration of integrated circuits continues to increase, and dust particles are more likely to cause chip failure or deterioration of reliability. For example, when metal dust particles fall on the metal wire, it may cause the metal wire to form a short circuit. In addition, if the dust particles of acidic ionic compounds fall on the metal wire, it may corrode it, so the dust-free chamber is an indispensable element for the manufacture of integrated circuits.